Suitable for the manufacture of KrF and ArF photo resister with superior photo acid generating power.
Photo acid generator for chemically amplified resist.

 
GRADE Structure Physical Characteristics
KPS-101 White crystals
M.W. = 412.45
M.P. = 132-134¡É
¥ëmax = 233 nm (¥å
=18,000)¥å248nm = 13,400
KPS-211 White crystals
M.W. = 426.47
M.P. = 101-102¡É
¥ëmax = 236 nm (¥å
=19,000)¥å248nm = 16,700
KPS-241-t White crystals
M.W. = 468.55
M.P. = 112-113¡É
¥ëmax = 238 nm (¥å
=20,300)¥å248nm = 18,600
KNS-101 White crystals
M.W. = 462.51
M.P. = 132-133¡É
¥ëmax = 298.6 nm (¥å =7,760)¥å248nm = 13,500
KPS-311 White crystals
M.W. = 442.47
M.P. = 98-100¡É
¥ëmax = 261 nm (¥å =14,8000)¥å248nm = 12,400
KPS-361 White crystals
M.W. = 504.54
M.P. = 89-91¡É
 
KPS-311-Bc White crystals
M.W. = 542.59
M.P. = 106-107¡É
¥ëmax = 258 nm (¥å
=17,700)¥å248nm = 15,600
KNS-311-Bc White crystals
M.W. = 592.61
M.P.= 145-146¡É
 
KPS-461 White crystals
M.W. = 520.61
M.P. = 81-82¡É
¥ëmax = 299.5 nm (¥å =20,000)¥å248nm = 9,700
KMS-411 White crystals
M.W. = 396.47
M.P. . = 76-77¡É
¥ëmax = 293.7 nm (¥å =54,500)¥å248nm = 5,800
KPS-501 White crystals
M.W. = 430.44
M.P. = 117-118¡É
¥ëmax = 234 nm (¥å
=18,000)¥å248nm = 13,800
KPS-511 White crystals
M.W. = 446.89
M.P. = 111-112¡É
¥ëmax = 239 nm (¥å
=21,900)¥å248nm = 19,800
KPS-521 White crystals
M.W. = 491.34
M.P. = 109-110¡É
¥ëmax = 243 nm (¥å
=23,300)¥å248nm = 22,800
KPS-531 White crystals
M.W. = 538.34
M.P. = 155-156¡É
¥ëmax = 262 nm (¥å
=18,400)¥å248nm = 15,500
KPS-104 White crystals
M.W. = 562.47
M.P. = 82-83¡É
¥ëmax = 233.6 nm (¥å =18,200)¥å248nm = 13,4000
KPS-314-Bc White crystals
M.W. = 692.61
M.P. = 62-63¡É
¥ëmax = 258.8 nm (¥å =38,300)¥å248nm = 15,700
KBNS-101 White crystals
M.W. . = 422.53
M.P. . = 104-105¡É
¥ëmax = 296.6 nm (¥å =5,760)¥å248nm = 2,270
KPI-105 White crystals
M.W. = 317.32
M.P. = 159-161¡É
¥ëmax = 220 nm (¥å
=47,300)¥å248nm = 3,500
KNI-105 White crystals
M.W. = 335.38
M.P.= 178-180¡É
¥ëmax = 232 nm (¥å
=13,600)¥å248nm = 2,300
KNI-101 White crystals
M.W.= 313.25
M.P. = ¡É
¥ëmax = nm (¥å = ) ¥å248nm =
KPS-104 White crystals
M.W. = 562.47
M.P. = 82-83¡É
¥ëmax = 233.6 nm (¥å =18,200) ¥å248nm = 13,400
KPS-214 White crystals
M.W. = 562.47
M.P. = ¡É
¥ëmax = nm (¥å = ) ¥å248nm =
KPS-244-t White crystals
M.W. = 618.58
M.P. = ¡É
¥ëmax = nm (¥å = ) ¥å248nm =
KPS-314 White crystals
M.W. = 592.50
M.P. = ¡É
¥ëmax = nm (¥å = ) ¥å248nm =
KPS-364 White crystals
M.W. = 654.57
M.P. = ¡É
¥ëmax = nm (¥å = ) ¥å248nm =
KPS-314-Bc White crystals
M.W. = 692.61
M.P. = 67-68¡É
¥ëmax= 258.8 nm (¥å =38,300)¥å248nm = 15,700